Zeiss Merlin

Brief description:

The Zeiss Merlin is an ultra-high resolution FE-SEM. The Gemini II column allows fast scanning modes with different probe currents (few pA–300 nA).

The connected Atlas System enables automatic scans over large areas only limited by the microscope stage and available image memory. Single image can have a maximum of 32k x 32k pixels.

Camera / detectors:

• SE + SE in-lens
• EsB (BSE)

Key features:

• High Voltage: 0.02–30 kV
• Emitter: Schottky Type
• Gemini II column
• ATLAS mosaic tool
• Shuttle&Find (based on AxioVision)