TFS Helios 600 i
Brief description
The Helios 600 i is a FIB / SEM with cryo stage.
- Elstar™ Schottky field-emission SEM technology
- Tomahawk FIB with low kV operation down to 500 V and beam currents up to 65 nA
- 150×150 mm high precision, high stability piezo stage
- Complete and integrated suite of prototyping capabilities, with 16-bit pattern generator for FIB & SEM, advanced patterning library
Technical details
Camera / detectors:
- Elstar in-lens SE detector (TLD-SE),
- Elstar in-lens BSE detector (TLD-BSE)
- Everhart-Thornley SE detector (ETD)
- High performance SE and SI (secondary ion) detector (ICE)
- Retractable low voltage, high contrast solid-state electron detector (vCD)
- Retractable STEM detector with BF/DF/ HAADF segments
- IR camera for viewing sample/column
- Beam current measurement
Software:
- AutoFIB™ package for macro and script based DualBeam automation
- AutoTEM™ wizard – automated TEM sample preparation
- NanoBuilder™ CAD based (GDSII) solutions for nanoprototyping of complex structures
- AutoSlice and View™ – automated sequential mill and view to collect series of slice images
- MAPS correlative workflow
- Drift Compensated Frame Integration (DCFI)
- Directly imported BMP file or streamfile for 3D milling and deposition
Column spec:
- Landing voltage range
- E-beam: 50V – 30 kV with Beam Deceleration mode
- I-beam: 500 V – 30 kV, Ga liquid metal ion source
- Probe current
- E-beam: up to 22 nA
- I-beam: 1 pA – 65 nA
Key features:
- Charge Neutralizer
- Plasma cleaner
- AutoProbe 200.2
- VCT 100 & Cryo stage
Electron beam resolution @ coincident
point
- 1.0 nm at 15 kV
- 1.6 nm at 5 kV
- 2.5 nm at 1 kV
GIS - Beam chemistry
- Platinum deposition
- Tungsten deposition
- Carbon deposition
Manuals:
- Instrument manual
Booking rules
The following general booking rules apply:
- One can book up to 14 days in advance
- One cannot book more than two half-day slots per week during “office hours” (8–18 h)
- The booked slot may fall into two categories:
- Typical 5-hours slot between 8–18 h, such as 8–13 h or 13–18 h (shorter slots are allowed)
- Off-hours slot: evening (18–8 h) and week-ends; for these you need a special “Off-Hours” license
- A full-day booking is allowed for cryo applications
- The slot can be modified or deleted 36 hours prior its start; afterwards, only ScopeM staff can make changes, upon the user presenting a replacement person or a case of “force majeure”
More than two slots per week can be booked if the desired free slot is in the next 48 hours.