TFS Quanta 200F

Brief description:

Multi-purpose analytical high resolution (HR-)FEG-SEM

Software:

• FEI Maps
• Ametek-EDAX TEAM, OIM, Genesis

Camera / detectors:

• Secondary electrons (SE): ETD, LFD, GSED
• Backscattered electrons (BSE): BSED, GAD
• Energy-dispersive X-ray spectroscopy (EDX): EDAX Octane Super
• Electron backscatter diffraction (EBSD): EDAX Hikari
• Cathodoluminescence (CL): Gatan MiniCL

Key features:

• High Voltage: 0.2–30 kV
• Emitter: Schottky Type FEG
• Vacuum modes:
  • High vacuum
  • Low vacuum (≤130 Pa)
  • ESEM (≤4000 Pa)