TFS Magellan 400

Brief description:

Dedicated extrem high resolution (XHR-) FEG-SEM

Software:

• FEI Maps
• Ametek-EDAX TEAM, OIM, Genesis

Camera / detectors:

• Secondary electrons (SE): ETD, TLD
• Backscattered electrons (BSE): CBS
• Transmitted electrons (STEM): BF, DF, HAADF
  
• Energy Dispersive X-ray Spectroscopy (EDX): EDAX Octane Super
• Electron Backscatter Diffraction (EBSD): EDAX Hikari Super

Key features:

• High Voltage: 0.05–30 kV
• Emitter: Schottky Type FEG with UC mode
• Lens modes: field-free, immersion, EDX
• Beam decceleration
• In-situ plasma cleaner
• Cryo-can