TFS Quattro ESEM

Brief description:

Multi-purpose high-resolution environmental-SEM.
The Quattro S is a dedicated environmental SEM (ESEM), that is a suitable platform for in-situ observation of complex structured materials. This customized ESEM allows studies across a large range of pressures while on-line mass-spectroscopic analysis of the gas phase promotes the structure-reactivity correlation under relevant conditions. The versatility of this instrument is also noted in the study of oxidation, alloying, corrosion, etching, crystal growth and catalysis.

High-vacuum:

• Secondary electrons (SE): ETD
  
• point electronic 4 quadrant back-scatter (BSE) detector, 3D BSE, 3D HT-BSE
  
• point electronic electron beam absorbed current (EBAC) detector
  
• Energy Dispersive X-ray Spectroscopy (EDX): EDAX Octane Elite 70 mm²  
  

Environmental mode:

• Secondary electron (SE): Low-vacuum detector (LVD), Gaseous SED (GSED)
• point electronic 4 quadrant back-scatter (BSE) detector
  
• point electronic electron beam absorbed current (EBAC) detector   

Software:

• TFS MAPS
• TFS AutoScript 3
• EDAX Apex
• Custom heating controller
  
• PV MassSpec
• PV Turbo viewer
• BRONHORST FLOWSUITE
• point electronic DISS 5
  
• MicroShape
  

Key features:

• High Voltage: 0.2–30 kV,
  
• Motorized stage (x,y,z), rotation 360°, tilt -15°/+90° In-situ Plasma cleaner
• Emitter: Schottky Type FEG
  
• Resolution: 1 nm @ 30 kV high-vacuum, 3 nm @ 30 kV low-vacuum  
  

In-situ accessories:

• Home-built laser heating stage (up 1200 °C), that allows heating and cooling up to 1000 °C/min
• Home-built built gas-feeding system
  
• Pfeiffer Prisma 250 Pro mass spectrometer 
  

Vacuum modes:

• High vacuum (3x10^-5 Pa)
• ESEM (<=4000 Pa), various gases: O₂, H₂, C_xH_y, Ar, N₂, CO₂