Hitachi SU5000

Brief description:

Multi-purpose high resolution FE SEM with a special add-on dedicated to correlative light and scanning electron microscopy

Software:

• Odemis integrated software for SECOM
• Oxford Aztec software for EDS and EBSD

Camera / detectors:

• Secondary electrons (SE): SE-lower and SE-top detectors, UVD
• Backscattered electrons (BSE): BSE detector
• Two energy dispersive x-ray spectroscopy (EDS) detectors
• Electron backscatter diffraction (EBSD) detector

Key features:

• High Voltage: 0.5–30 kV (0.1–2.0 kV using the deceleration function)
• Emitter: Schottky Type FE
• Vacuum modes: High vacuum and low vacuum (10–300 Pa, air)
• Deceleration function: high resolution imaging at low landing voltages
• Delmic add-on: SECOM platform for integrated correlative light and scanning electron microscopy (4 LED sources: 390/485/560/650 nm, 40x dry objective, sCMOS camera, LM/SEM images auto-alignment)
• Two large area window (100 mm²) Oxford Ultim Max 100 EDS detectors mounted at 90° to each other
• Oxford Symmetry 2 EBSD detector with maximum pixel resolution of 1244 x 1044 and maximum speed of 4500 frames per second
  

Booking rules

The general ScopeM booking rules apply.

Exceptions for this system: Priority is given to the activities of microscopy training program.